Trio-Tech Stainless Steel Wet Process Station

WET PROCESS STATIONS
Universal Systems / Trio-Tech offers a complete line of customized wet process equipment for submicron clean-room environments where processing of sensitive materials is required. For wafer processing applications such as pre-diffusion rinsing, nitride film etching and photoresist stripping, Universal Systems offers equipment with superior design and materials selection, yielding consistently high quality silicon wafers. For similar applications, such as flat panel and magnetic disk processing, Universal has many years experience in working with customers to design an optimum process solution. Universal Systems offers a varied choice of wet process station configurations for the most stringent clean room requirements. Universal quality and safety controls incorporate designs in accordance with several manufacturing guidelines, including SEMI (S2-93) Manufacturing Safety Guidelines. Smoke tunnel tests performed by Dryden Engineering of California led to the current exhaust system design. ANSI/ASHRAE Standard 110-1985 particle testing performed by Dr. Knutson of Pace, Inc., Minnesota for MIT Lincoln Laboratory, showed control levels below 0.03ppm.

Station Configurations
Typical Station configurations are available in two standard types - rear or front access. Rear access configurations are designed so that there is a rear cabinet in the back of the station, with electrical components mounted in the top part of the cabinet and plumbing components mounted in the bottom portion of the cabinet. Front access designs allow for a smaller footprint, however all plumbing components are located under the deck top. Deck tops are easily removed for easy service access to plumbing components - they are simply lifted off, no tools required. Tanks are pegged in place so these components are also easily removed for servicing. Electrical components for both designs are isolated in the head-case area, at the top of the stations.

Description of Major Components
• Modular design and construction for simplified removal/servicing of process tanks
• Heavy-duty casters for ease of movement adjustable leg levelers
• Head-case folds down flat in front for easy service access
• Kliplock sealed electrical raceways
• DI water manifold (supply and return) is free of "dead legs", and constantly recirculated
• Magnehelic or photohelic gauge interlocked to EMO
• EMO (Emergency Machine Off) circuit with EMO button on rear of station
• Chemical resistant touch tone controls
• Side shields
• Wires routed in the plenum are encased in chemical resistant tubing
• 2-inch plenum drain
• Up draft exhaust
• Exhaust transition and damper 8 inch I.D.
• Nitrogen purged electrical enclosures