626A-14039 MKS Instruments Absolute Baratron Capacitance Manometer

The MKS Instruments 622A/626A/627A/628A/629A Absolute Pressure Transducers are part of the MKS family of general purpose pressure transducers designed to provide accurate, reliable, and repeatable pressure measurements in the range from 1K Torr to as low as 0.05 Torr F.S. (627 and 629). These instruments operate with ±15 VDC (±5 %) input @ 35 mA, 250 mA, or 500 mA, depending upon the unit, and provide 0 to 10 VDC output linear with pressure. All instruments expose only Inconel to the process permitting use with corrosive or dirty gases and eliminating contamination of the process with transducer materials. Measurements are independent of gas composition and all of the units have a minimum measuring range of four decades.

Using the latest single-sided, dual-electrode Inconel transducer design, coupled with a low impedance, fixed-frequency bridge signal conditioner, these instruments are capable of withstanding high overpressure conditions (45 psia) with minimal or no shifts in output over their range. The advanced bridge signal conditioning technology provides high accuracy and operation which is extremely temperature-stable at operating pressure.

Protection from FR interference and noisy electrical environments is increased by the use of a metal case, by internal design elements, and by the use of surge and ESD suppression networks and RFI filtering on all inputs and outputs.

The MKS Instruments 622 and 626 transducers have an accuracy of 0.25% of reading (optional 0.15%of reading), and are identical except for their connectors; the 622 unit has a 5-pin terminal block connector and the 626 unit has a 15-pin Type "D" connector. These instruments have been developed for applications requiring a small, economical transducer which delivers accurate and repeatable measurements with a resolution of 1 x 10^-4 F.S.

The Types 627, 628, and 629 instruments are designed specifically to meet the needs of vacuum process systems where environmental and process conditions are particularly demanding. Temperature control of the transducer minimizes the effects of ambient or process temperature variations typically encountered in process line environments. The 627 and 629 transducers control the transducer temperature at 45°C and the 628 unit controls the transducer temperature at 100°C, thereby minimizing contamination from the process. The Type 627 and 629 transducers have an accuracy of 0.12% of reading (0.1 and 0.05 Torr units have an accuracy of 0.15% of reading), and the Type 628 transducer has an accuracy of 0.25% of reading.