60170-102-02B Keithley Module

The Tektronix / Keithley S600 Series Parametric Test Systems are designed to help fabs and wafer foundries reduce their Cost of Test (COT). Ongoing changes in materials, design rules, and wafer size typically produce a semiconductor process "inflection" roughly every 18 months. These rapid changes mean one of the most significant contributors to a semiconductor manufacturer's COT is capital equipment reuse, rather than the initial equipment cost. That makes it critical to be able to upgrade a parametric test system cost-effectively to address new requirements. While most fabs typically expect 70-80% capital equipment reuse across multiple process generations, Keithley parametric testers have provided industry-leading capital equipment reuse over more than five technology inflections.

The S680 tester is Keithley's latest, most powerful system configuration based on our Series S600 Linux or Solaris/UNIX platform. Like our earlier Series S600 systems, it offers fabs high throughput combined with superior DC measurement capability and broad testing flexibility. The S680 has been enhanced to address emerging measurement needs with the capability to characterize ultra-thin gate dielectrics, SOI, new devices, new materials like copper and low-K dielectrics, femtoamp-level DC leakage, and RF measurements of high performance BiCMOS and analog devices.

Series S600 testers are well suited for use in a wide range of testing environments, including process control, process and equipment tuning and optimization, equipment qualification, Wafer Acceptance Testing, and device modeling and characterization. Their high throughput and low-level current sensitivity make them ideal for applications such as production test for new device technologies, including System on a Chip (SOC), FeRAM, MRAM, PCRAM, and high density devices.

With the industry moving toward larger wafer sizes, fabs are being challenged to find the time to do the sampling they need without delaying production. High speed Source-Measure Units (SMUs) and high throughput software options like true parallel testing and site-level/real-time adaptive testing allow S680 users to test 300mm wafers in the same time once required to test a 200mm wafer.