XTC Inficon Thin Film Thickness and Rate Monitor

The Inficon / Leybold XTC Thin Film Thickness and Rate Monitor is a remarkable, affordable instrument that is less expensive than the crystal monitor it may replace, and is invaluable in any single layer vacuum deposition, sputtering process, or linked together in co-deposition vacuum or sputtering processes. The liquid crystal display keeps one continuously informed with complete deposition data including rate, thickness, and elapsed time as well as special messages like Crystal Fail. Complete, continuous real-time information reduces the possibility of costly mistakes.

The XTC unites with Inficon's field proven sensor heads and 6 MHz Plano-convex quartz crystals. The two provide superior sensitivity to measure low rate applications and the precision needed for demanding process repeatable specifications. The XTC has four special control functions. First is rate which allows complete control over a requested rate change during deposition. Next is the shutter delay feature which allows one to establish the desired deposition rate before the source shutter opens. third is the XTC's ability to allow completion of a run on time-power in the event of an unexpected crystal failure. Fourth is RateWatch; RateWatch automatically opens the shutter exposing the sensor to the deposition source, adjusts the power so the actual rate will precisely equal the desired rate within the programmed accuracy, and then automatically closes the sensor shutter holding the power at the adjusted level.