KLA Tencor SFS-7600 Surfscan Patterned Wafer Inspection System

Stock # 66863-5
This KLA Tencor SFS-7600 Surfscan Patterned Wafer Inspection System is used and in good condition. We do not have the expertise to fully test this unit and have documented all the information gathered from it in this page. It is recommended that the purchaser of this system contact KLA-Tencor for installation, setup and maintenance. A very good effort was made to retain accessories. This item will be sold as/is without warranty and will be priced accordingly. However, if desired, this unit can be inspected on-site. Please contact Artisan Technology Group Sales to set this up.

The aligner operated on boot up and the internal fixture accepted a 200mm wafer. The aligner takes 100, 125, 150, and 200mm wafers however the internal fixture will only take 200mm wafers; wafer racks are sold separately. The system needs both a vacuum and air source to operate. The right side keyboard door hinge is broken and the keyboard is missing two keys however this does not affect its functionality. Service screen indicates that the laser will need to be replaced. You can view image of the keyboard and service screen shot using the links below.

PC Configuration:

• Processor: 66MHz
• RAM: 23 MB
• HDD: 850 MB

Software:

• SFS: 7x00 Series Software Ver. 3.5.0

View Photo of Keyboard
Surfscan 7600 Screen Shots (pdf)

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KLA Tencor SFS-7600 Surfscan Patterned Wafer Inspection System
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