- 325 nm Laser and White Light Optical System
- Four White Light Objectives 5x, 50x, 100, and 150x
- 325nm 100x UV Objective
- High-Resolution Color CCD Camera
- 24-bit Integrated White Light Package
- Precision XYZ Stage
- Automatic Deskew
- Dual Pentium PC with Jaz Drive
- Auxillary 13 Inch Video Monitor
- NFS SW Interface for Ethernet
- Tencor File Format Interface
- KLARF Format Interface
- Integrated Mini-Environment
- Exhaust Blower With Interconnect Ducts
- 300mm Wafer Handler with Integrated 300mm Asyst Loadports and Hermos Carrier ID readers
- SEMI Communication/Automation Standards: E84, E87, E40, E90 and E94
- GEM/SECS 232 (SEMI-E4, E5 and E30)
- Impact ADC option
The CRS can display any combination of a 2D focal plane image, a 3D surface image rotated to any orientation, any horizontal slice of a volume image, and vertical 2D cuts through any of the 3D images in XZ or YZ planes. The laser scan amplitude can vary for 1x, 2x, 4x, or 8x zoom within the same magnification of the microscope, providing on-screen magnification up to 20,000x with a 100x objective at Zoom level 8.
An important feature of the confocal microscope is its extremely narrow depth of focus in laser light, which makes it possible to view images of individual layers in semiconductor structures, and to resolve structural and defect features as small as 0.15 µm.
The CRS can be configured from fully manual operation to fully automated operation. There are manual and automatic options for cassette loading, wafer loading, deskew, defect inspection and analysis, image capture, data storage, and communication. The CRS can run automatically using locally stored recipes, or can receive commands and respond to them over a network.
KLA Tencor PC3XD-PF1 Controller Board Manuals, Datasheets, Drivers, Links
KLA Tencor PC3XD-PF1 Controller Board Specs
| External Frame | |
| Cleanliness | Class 1 |
| Particle Generation | <0.01 each of >0.3 µm added per 1 cm² per wafer pass in Class 1 environment |
| External Panels | Stainless Steel |
| Air Flow | Cleanroom Laminar Air |
| Vibration Isolation | 3-point Active Air Damping & Leveling |
| Frame | Plated Mild Steel; Inert Gas-welded Construction |
| Support | Transport: 3-inch Textite Wheels (4); Operation: 2.5-inch Leveling Pads (4) |
| Controls | On/Off, Emergency Off, Circuit Breakers, Laser Interlock System |
| Throughput based on 8-inch Wafers | |
| Load Wafer to 1st Deskew Point1 | 28 s |
| Manual Deskew to 1st Defect | 15 s |
| AutoDeskew : 2 point | 20 s |
| Move & Focus | 2.4 s (live laser mode, 8 mm travel) |
| Unload Wafer | 13 s |
| Image Acquisition | 5.5 s (512 × 512 × 64) |
| Image Display (512 × 512 × 64) | 2 s |
| Image Storage (512 × 512 × 64) | Surface Image:0.1 s |
| Volume Image:4.0 s | |
| Facilities | |
| Electrical - Main System | AC 240/220/208/200 V, 1ø, 30 A @ 208 V |
| Air | 80 psi, 3 scfm |
| Vacuum | 20 in. Hg, 0.5 scfm |
| General | |
| Manufacturers | KLA Tencor |
| Model | PC3XD-PF1 |
| Condition | Used and in Excellent Condition |
| Product Family | KLA-Tencor CRS-3100, KLA Tencor CRS 3100, KLA-Tencor CRS3100, KLA Tencor CRS3100, KLA CRS-3100, KLA CRS 3100, KLA CRS3100, Tencor CRS-3100, Tencor CRS 3100, Tencor CRS3100, CRS-3100, CRS3100, KLA-Tencor CRS-3000, KLA Tencor CRS 3000, KLA-Tencor CRS3000, KLA Tencor CRS3000, KLA CRS-3000, KLA CRS 3000, KLA CRS3000, Tencor CRS-3000, Tencor CRS 3000, Tencor CRS3000, CRS-3000, CRS3000 |
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Item to Inspect: 63500-75 - KLA Tencor PC3XD-PF1 Controller Board
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