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901P-82030 MKS Instruments Loadlock Transducer

Write a reviewStock # 62197-4
1 In StockAvailable today · ships from Champaign, IL
$385.00USD
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Item: MKS Instruments / Granville-Phillips 901P-82030 Loadlock Transducer · Stock # 62197-4

Item details
Part Number901P-82030
In Stock1
AvailableToday
LocationChampaign, IL USAships worldwide
Stock #62197-4
Ship Weight1 lbs /ea
ConditionUsed and in Excellent Condition
InspectionBefore every shipment
Warranty1-Year Warranty with 30-Day Return Guarantee
Description
Configuration:
• Type: 901P Piezo Transducer
• Flange: KF16 Extended
• Interface: RS485/Analog
• Analog Out: Standard MKS
• Connector Relays: D-Sub 15 Pin HD Male/Three Relays
• Enclosure: Standard/Viton Sealing
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Item to Inspect: 62197-4 - MKS Instruments / Granville-Phillips 901P-82030 Loadlock Transducer

More Information

MKS Instruments / Granville-Phillips 901P-82030 Loadlock Transducer Overview

Features:

  • Wide Pressure Measurement Range (0.00001 Torr up to Atmosphere)
  • MicroPirani Sensor for Low to Medium Vacuum Measurement
  • Piezo Sensor for Accurate Near-Atmospheric Pressure Sensing
  • Stable, Repeatable Readings Under Varying Conditions
The MKS Instruments / Granville-Phillips Series 901P Loadlock Vacuum Transducer is a compact, high-performance pressure sensor designed specifically for loadlock and vacuum process applications. It combines MicroPirani thermal conductivity sensing with a piezo-based pressure sensor in a single device, allowing it to accurately measure pressure from deep vacuum through atmosphere.

This dual-sensor design provides fast response, stable readings, and improved accuracy across the entire pump-down and vent cycle, making the 901P well-suited for semiconductor tools, research systems, and automated vacuum equipment. The transducer is intended for system integration and remote operation, with output and configuration handled through digital communication interfaces or external controllers rather than a front-panel display.

The 901P is widely used where reliable, repeatable pressure measurement is required to protect processes, automate sequencing, or monitor loadlock performance.

The MKS Instruments 901P-82030 Loadlock Transducer may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

Loadlock Transducer Price & Specs

MKS Instruments / Granville-Phillips 901P-82030 Loadlock Transducer Description

Functions

This appears to be a specification for an **MKS Instruments Granville-Phillips 901P-82030 Loadlock Transducer**, which is a vacuum pressure measurement device commonly used in semiconductor manufacturing and other vacuum applications. ## Key Specifications Breakdown: **Model:** 901P-82030 Piezo Transducer - High-accuracy vacuum gauge for loadlock applications - Piezo technology provides excellent stability and reliability **Physical Configuration:** - **Flange:** KF16 Extended - standard vacuum fitting for easy installation - **Enclosure:** Standard design with Viton sealing for chemical resistance **Interface Options:** - **RS485:** Digital communication protocol for system integration - **Analog Output:** Standard MKS format for compatibility with existing systems **Connectivity:** - **D-Sub 15 Pin HD Male connector** with three integrated relays - Relays enable automated control functions based on pressure setpoints ## Typical Applications: - Semiconductor loadlock chambers - Vacuum coating systems - Research vacuum applications - Process control in vacuum environments ## Key Benefits: - Dual interface capability (digital + analog) - Robust Viton sealing for harsh environments - Integrated relay outputs for process automation - KF16 flange for standard vacuum system integration This transducer is well-suited for applications requiring precise vacuum measurement with both monitoring and control capabilities in loadlock or similar vacuum chamber applications.

This section includes content generated with the assistance of artificial intelligence (AI) tools. AI is used to increase efficiency and provide timely information. Please note that the content may not have been reviewed for accuracy or completeness. Use this information at your own discretion, and verify details independently as needed.

MKS Instruments / Granville-Phillips 901P-82030 Loadlock Transducer Manuals, Datasheets, Drivers, Links

MKS Instruments / Granville-Phillips 901P-82030 Loadlock Transducer Specs

General
ManufacturerMKS Instruments
Model901P-82030
ConditionUsed and in Excellent Condition
Product Family901P, 9019-4E0V0,

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Artisan Scientific Corporation dba Artisan Technology Group is not affiliated with or a distributor for MKS Instruments. The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.

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