355410-1-YD-T MKS Instruments Micro-Ion Hot Cathode Transducer

MKS Instruments 355410-1-YD-T Micro-Ion Hot Cathode Transducer Overview

Features:

• Dual Filaments Increase Equipment Uptime
• Ultra-Clean Construction Allows Rapid Response During Pump Down
• Rugged, All-Metal, RF and Noise-Immune Transducer

The MKS Instruments 355410-1-YD-T Micro-Ion Hot Cathode Transducer may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

Micro-Ion Hot Cathode Transducer Price & Specs

MKS Instruments 355410-1-YD-T Micro-Ion Hot Cathode Transducer Description

Functions

High-vacuum pressure measurement using hot cathode ionization gauge principle for measuring pressures from 10^-3 to 10^-9 Torr. Generates ion current proportional to gas density by electron bombardment from heated filament. Features dual filament design for redundancy, bakeable construction for UHV compatibility, and nude gauge configuration for fast response. Interfaces with gauge controllers via standard electrical feedthrough connections providing filament power, grid voltage, and ion current measurement. Commonly used in semiconductor processing, thin film deposition, mass spectrometry, particle accelerators, and surface science applications requiring accurate high vacuum monitoring.

Platforms

Designed for high-vacuum (HV) and ultra-high-vacuum (UHV) systems. Mechanically interfaces with a vacuum chamber via a 2.75-inch ConFlat (CF) flange. Electrically connects to a compatible hot cathode ionization gauge controller via a 9-pin D-subminiature connector. The controller provides operating voltages and processes the ion current to determine pressure. System integration is achieved through the controller's analog or digital outputs for process control in semiconductor manufacturing, surface analysis, and thin-film deposition systems.

Applications

Functions: Measures vacuum pressure via ionization of gas molecules. Operates from 1x10-10 to 1x10-2 Torr. Includes an integrated emission regulator and utilizes a hot cathode, typically a tungsten filament, for electron generation. \nHardware: Designed for use in vacuum chambers. Requires a regulated DC power supply and a dedicated controller for operation and signal processing.\nConnectivity: Provides vacuum pressure readings through an analog output signal (e.g., 0-10 VDC) and/or a digital interface (e.g., RS-232/485). \nApplications: Thin film deposition, vacuum coating, semiconductor manufacturing, research and development, and leak detection.

Accessories

Requires compatible vacuum power supply and controller for hot cathode operation; connects via coaxial cable with SMA connector; interfaces include analog output via BNC connector for pressure readout; requires vacuum fittings compatible with transducer flange (CF or ISO standard); calibration kit recommended for accuracy verification.

Interfaces

Vacuum connection is a 2.75 inch Conflat (DN40CF) flange. Electrical connection is a 9-pin male D-subminiature (DE-9M) connector. This interface provides +13.5 to +30 VDC power input, a 0-10 VDC logarithmic analog pressure signal output, and digital I/O for filament, degas, and status. Features a yttria-coated iridium filament. Requires a compatible controller for power and signal processing, and a DE-9F cable.

Specifications

The hot cathode transducer measures vacuum pressure in the range of 1x10-10 to 1x10-2 Torr using a hot cathode ionization gauge and a Faraday cup. It operates on a 24VDC supply. It communicates via a 0-10 VDC analog output signal representing pressure. The transducer interfaces with vacuum control systems, data acquisition units, and vacuum chambers. Common applications include thin film deposition, and vacuum metrology.

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MKS Instruments 355410-1-YD-T Micro-Ion Hot Cathode Transducer Manuals, Datasheets, Drivers, Links

• MKS Instruments 355 Series Datasheet (pdf)
• MKS Instruments 355 Series Manual (pdf)
• View all MKS Instruments products

MKS Instruments 355410-1-YD-T Micro-Ion Hot Cathode Transducer Specs

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