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CRS-3100 KLA Tencor Optical Review System

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Item: KLA Tencor CRS-3100 Optical Review System · Stock # 63500-10

Item details
Part NumberCRS-3100
AvailabilityNot in Stock
LocationChampaign, IL USAships worldwide
Stock #63500-10
Ship Weight2000 lbs /ea
ConditionParts Grade / As-Is Final sale
WarrantyNo Warranty
Description
This system appears to be complete. System includes: CRS-3100 Optical Review System, Sony Trinitron Color Video Monitor, Toshiba Image Master Digital Video Printer, Sony Trinitron Multiscan Monitor, Blower, Hoses for Blower, Keyboard and Mouse, Emergency Stop Switch, RGB Video Cables, Toshiba Remote Printer Control, VGA Cable (Box), XYZ Controller. For specific photos of what is included, see bottom of this stock-item.

We do not have the expertise to fully test this unit and have documented all the information gathered from it in this page. It is recommended that the purchaser of this system contact KLA-Tencor for installation, setup and maintenance. A very good effort was made to retain accessories. This item will be sold as/is without warranty and will be priced accordingly. However, if desired, this unit can be inspected on-site. Please contact Artisan Technology Group Sales to set this up.

This unit will ship in several crates. See picture section for photo of crates.

PC Configuration:
• Processor: Pentium III 850Mhz
• OS: Windows NT 4.0 SP6
• Memory: 265 MB RAM
• Hard Drive: 17 GB HDD
• Keyboard, Mouse and Monitor Included

Software Installed:
• Hummingbird Connectivity V7.0
• Equinox Quickview V530
• Equinox V4.16
• Iomega
• Iomega backup
• EQT32 V3.15
• Adobe Acrobat 4.0
• KLA Tencor 2.1.3
• KLA Tencor CRS V6.0.0.13 June 13 2004

Input Voltage: 208VAC, Single Phase

View Photo of CRS 3100
View Photo of CRS 3100
View Photo of CRS 3100
View Photo of the system connected to computer
View Photo of hour meter for the laser
View Photo of computer, emergency stop and xyz controller
View Photo of video monitor and printer
View Photo of blower motor and hoses
View Photo of locator plates

Kylie S.Artisan product specialist

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Item to Inspect: 63500-10 - KLA Tencor CRS-3100 Optical Review System

More Information

KLA Tencor CRS-3100 Optical Review System Overview

Features:

  • 325 nm Laser and White Light Optical System
  • Four White Light Objectives 5x, 50x, 100, and 150x
  • 325nm 100x UV Objective
  • High-Resolution Color CCD Camera
  • 24-bit Integrated White Light Package
  • Precision XYZ Stage
  • Automatic Deskew
  • Dual Pentium PC with Jaz Drive
  • Auxillary 13 Inch Video Monitor
  • NFS SW Interface for Ethernet
  • Tencor File Format Interface
  • KLARF Format Interface
  • Integrated Mini-Environment
  • Exhaust Blower With Interconnect Ducts
  • 300mm Wafer Handler with Integrated 300mm Asyst Loadports and Hermos Carrier ID readers
  • SEMI Communication/Automation Standards: E84, E87, E40, E90 and E94
  • GEM/SECS 232 (SEMI-E4, E5 and E30)
  • Impact ADC option
The KLA-Tencor Confocal Review Station (CRS) is an automated laser/white light microscope system used for classification of defects on both bare and patterned wafers, using defect maps generated by a variety of instruments. The CRS combines a brightfield/darkfield white-light microscope with a laser confocal microscope, automated wafer handling, and controlling software.

The CRS can display any combination of a 2D focal plane image, a 3D surface image rotated to any orientation, any horizontal slice of a volume image, and vertical 2D cuts through any of the 3D images in XZ or YZ planes. The laser scan amplitude can vary for 1x, 2x, 4x, or 8x zoom within the same magnification of the microscope, providing on-screen magnification up to 20,000x with a 100x objective at Zoom level 8.

An important feature of the confocal microscope is its extremely narrow depth of focus in laser light, which makes it possible to view images of individual layers in semiconductor structures, and to resolve structural and defect features as small as 0.15 µm.

The CRS can be configured from fully manual operation to fully automated operation. There are manual and automatic options for cassette loading, wafer loading, deskew, defect inspection and analysis, image capture, data storage, and communication. The CRS can run automatically using locally stored recipes, or can receive commands and respond to them over a network.

The KLA Tencor CRS-3100 Optical Review System may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

Optical Review System Price & Specs

KLA Tencor CRS-3100 Optical Review System Manuals, Datasheets, Drivers, Links

KLA Tencor CRS-3100 Optical Review System Specs

External Frame
CleanlinessClass 1
Particle Generation<0.01 each of >0.3 µm added per 1 cm² per wafer pass in Class 1 environment
External PanelsStainless Steel
Air FlowCleanroom Laminar Air
Vibration Isolation3-point Active Air Damping & Leveling
FramePlated Mild Steel; Inert Gas-welded Construction
SupportTransport: 3-inch Textite Wheels (4); Operation: 2.5-inch Leveling Pads (4)
ControlsOn/Off, Emergency Off, Circuit Breakers, Laser Interlock System
Throughput based on 8-inch Wafers
Load Wafer to 1st Deskew Point128 s
Manual Deskew to 1st Defect15 s
AutoDeskew : 2 point20 s
Move & Focus2.4 s (live laser mode, 8 mm travel)
Unload Wafer13 s
Image Acquisition5.5 s (512 × 512 × 64)
Image Display (512 × 512 × 64)2 s
Image Storage (512 × 512 × 64)Surface Image:0.1 s
Volume Image:4.0 s
Facilities
Electrical - Main SystemAC 240/220/208/200 V, 1ø, 30 A @ 208 V
Air80 psi, 3 scfm
Vacuum20 in. Hg, 0.5 scfm
General
ManufacturerKLA Tencor
ModelCRS-3100
ConditionParts Grade / As-Is
Product FamilyKLA-Tencor CRS-3100, KLA Tencor CRS 3100, KLA-Tencor CRS3100, KLA Tencor CRS3100, KLA CRS-3100, KLA CRS 3100, KLA CRS3100, Tencor CRS-3100, Tencor CRS 3100, Tencor CRS3100, CRS-3100, CRS3100, KLA-Tencor CRS-3000, KLA Tencor CRS 3000, KLA-Tencor CRS3000, KLA Tencor CRS3000, KLA CRS-3000, KLA CRS 3000, KLA CRS3000, Tencor CRS-3000, Tencor CRS 3000, Tencor CRS3000, CRS-3000, CRS3000

Need More Info

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With our team, you’re just a message away from clarity and confidence. Whether you have a specific question, need a particular image, or want more details, the request form puts you in control. Let us know what you need, and we’ll bring the answers straight to you—no guesswork required!

Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.

Artisan Scientific Corporation dba Artisan Technology Group is not affiliated with or a distributor for KLA Tencor. The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.

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Condition
Parts Grade / As-Is

Sold for parts or repair. The unit may be missing components required to function, may have major cosmetic damage, or its condition may be unknown. Any known details are stated in the stock item description. Final sale.

Warranty
No Warranty

Final sale: not covered by the limited warranty or the 30-day return policy. See the Terms of Sale.

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