902B-1E0V0 MKS Instruments Absolute Piezo Transducer

The MKS Instruments / Granville-Phillips 902B Series Absolute Piezo Transducers combine the pressure measurement technology of a MEMS-based Piezo sensor with a metal sealed stainless steel 316 diaphragm and integrated electronics. The 902B series provide economical, absolute pressure measurement that is independent of gas type.

With a 1000 Torr Full Scale range, the sensor is ideal for a wide range of applications including semiconductor manufacturing, thin film coatings, freeze-drying, analytical instruments, medical devices, automotive and aerospace.

The 902B Series Piezo transducers are based on a silicon piezo resistive pressure sensor that measures absolute vacuum pressure with an accuracy of ±1% of Reading (from 100-1000 Torr). The sensor is robust and resistant to mechanical vibration and g-forces. Furthermore, the sensor technology makes the transducer gas type independent. With only stainless steel 316 exposed to the process gas, the transducer can be used in many demanding applications.

The 902B Series are manufactured with an RS232, RS485, and EtherCAT digital communication interface for setup of transducer parameters and to provide real time pressure measurement. In addition, the 902B series has a 16-bit analog pressure output that can be interfaced to external analog equipment for pressure readout or close loop control. The standard output is linear from 0-10 VDC, but other outputs are also manufactured.

The 902B Series has up to three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. The SPDT relays include both normally open and close contacts and can be set to energize above or below a set point trip value.

Many applications require continuous surveillance of system pressure and warning of atypical pressure levels. The flexible relay options of the 902B can provide warning to external safety logic in cases of abnormal pressure and loss of power. The display option offers real time readout of measured pressure, view of transducer settings and set point status. The compact design of the 902B significantly reduces the amount of space occupied by the transducer. This is particularly appealing to system designers and allows design of compact systems or equipment. The 902B is also available in a 9 pin version, offering backward compatibility with the first generation 902. The 902B can be used as a standalone device or together with the PDR900 controller.